EMT型/EBT型 可满足超高真空要求的涡轮分子泵Turbo Molecular Pump
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EMT型/EBT型 可满足超高真空要求的涡轮分子泵
涡轮分子泵、磁悬浮型/球轴承型、小型、轻量、可选择控制器一体型、可选择空冷/水冷式、满足联网需求、可选配高温/耐腐蚀规格、安装方式自由灵活、可满足CE标示/SEMI S2/NRTL要求
Model EMT
产品介绍
产品阵容包括2种涡轮分子泵：电磁轴承EMT型、球轴承EBT型。能够广泛满足340～4,200L/min的大范围排气速度,可选择控制器一体型以及水冷/空冷方式。产品阵容覆盖高温规格、耐腐蚀规格、处理反应副产物、低振等各种选配件，可灵活满足广泛的用途需求。
Magnetic bearing type
●Wide pumping speed variations from 340 to 3,300L/s
●Integrated controller
●Both air-cooled and water-cooled types available
(except Model EMT2200MK and EMT3300MK)
●High-Temperature and anti-corrosion specification available (option)
●Lineup of a wide range of special specifications
(e.g., high temperature and ultra-low vibration models)
●Can be set in any direction
●Network connection available
●Compliant with CE marking, SEMI & NRTL
Ball bearing type
●Grease lubricated ball bearing type
●Wide pumping speed variations from 70 to 2,400L/s
●Compact, light weight, low cost
●Integrated controller types available
(for Models EBT70 and EBT240 only)
●High shock resistance
●Air-cooled and water-cooled types available
(air-cooled only for Models EBT70F and EBT240F)
●Can be set in any direction
●Network connection available
●Compliant with CE marking, SEMI & NRTL
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