EMT型/EBT型 可满足超高真空要求的涡轮分子泵Turbo Molecular Pump

涡轮分子泵、磁悬浮型/球轴承型、小型、轻量、可选择控制器一体型、可选择空冷/水冷式、满足联网需求、可选配高温/耐腐蚀规格、安装方式自由灵活、可满足CE标示/SEMI S2/NRTL要求

Model EMT

产品介绍

产品阵容包括2种涡轮分子泵：电磁轴承EMT型、球轴承EBT型。能够广泛满足340～4,200L/min的大范围排气速度,可选择控制器一体型以及水冷/空冷方式。产品阵容覆盖高温规格、耐腐蚀规格、处理反应副产物、低振等各种选配件，可灵活满足广泛的用途需求。

Magnetic bearing type

●Wide pumping speed variations from 340 to 3,300L/s

●Integrated controller

●Both air-cooled and water-cooled types available

(except Model EMT2200MK and EMT3300MK)

●High-Temperature and anti-corrosion specification available (option)

●Lineup of a wide range of special specifications

(e.g., high temperature and ultra-low vibration models)

●Can be set in any direction

●Network connection available

●Compliant with CE marking, SEMI & NRTL

Ball bearing type

●Grease lubricated ball bearing type

●Wide pumping speed variations from 70 to 2,400L/s

●Compact, light weight, low cost

●Integrated controller types available

(for Models EBT70 and EBT240 only)

●High shock resistance

●Air-cooled and water-cooled types available

(air-cooled only for Models EBT70F and EBT240F)

●Can be set in any direction

●Network connection available

●Compliant with CE marking, SEMI & NRTL